Magnetron Sputtering and Multilayer Deposition of Nb₃Sn  Superconducting Thin Film

Nb3Sn is a very good kind of superconducting material. We rst sputtered the Nb and Sn with two magnetrons and deposited multilayer, and then obtained the superconducting thin lm by annealing. By this method, it is convenience to change the stoichiometric ratio and to investigate the property of Nb3Sn. We
measured the superconducting parameters of the thin lm. The critical temperature is about 17 K and the residual resistance radio (RRR) is about 5. The method is needed to improve and increase the RRR, in order that the multilayer deposition can be used in the superconducting cavity fabrication.