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YANG Lei, WANG Zhusheng, LI ZhankuiLIU Fengqiong, WANG Xiuhua, CHEN Cuihong, LI Haixia, LI Ronghua, RONG Xinjuan, ZU Kailin, LI Chunyan, LU Ziwei, . Study of ZnO Ultraviolet Detector[J]. Nuclear Physics Review, 2015, 32(1): 69-72. DOI: 10.11804/NuclPhysRev.32.01.069
Citation: YANG Lei, WANG Zhusheng, LI ZhankuiLIU Fengqiong, WANG Xiuhua, CHEN Cuihong, LI Haixia, LI Ronghua, RONG Xinjuan, ZU Kailin, LI Chunyan, LU Ziwei, . Study of ZnO Ultraviolet Detector[J]. Nuclear Physics Review, 2015, 32(1): 69-72. DOI: 10.11804/NuclPhysRev.32.01.069
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    • Abstract
  • ZnO ultraviolet(UV) detectors with Metal-Semiconductor-Metal(MSM) structure were fabricated by the vacuum evaporation of Au, Ag, and Al on the n-type ZnO single crystal, which was grown with hydrothermal synthesis method. Five types of MSM ZnO detectors(Au-ZnO-Au, Ag-ZnO-Ag, Au-ZnO-Al, Ag-ZnO-Al,l-ZnO-Al) were illuminated with 365 nm UV light respectively, and their corresponding I-V(Current-Voltage) characteristics were measured. The UV photocurrent values for Au-ZnO-Au and Ag-ZnO-Ag detectors were 1x106 times than their dark current values, and these facts imply that the Au-ZnO-Au and Ag-ZnO-Ag detectors were rather good UV detectors compared to Au-ZnO-Al, Ag-ZnO-Al, Al-ZnO-Al detectors. The photocurrent of the MSM ZnO detectors was also sensitive to the cubic resistance of the ZnO crystal. And it’s found that the higher resistance rate the ZnO crystal the smaller photocurrent value the detector under the same working voltage.
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