Simulation of Tip Parameters Influence on Electron Emission in SPEES
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Graphical Abstract
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Abstract
The simulation of the Auger electron emissions in scanning probe electron energy spectrometer (SPEES) is reported. By simulating the trajectory of Auger electrons, we systematically investigate the dependence of the emission efficiency of Auger electrons on the shape of tip, the biasing voltage, and the distance between the tip and sample surface, as well as the intensity distributions of Auger electrons at the edge of tipsample region. The results will be the significant reference for improving the sensitivity, spatial and energy resolutions of SPEEs.
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