Application of Monte Carlo Simulations in Measurement of Atomic Inner-shell Ionization Cross-sections by Low-energy Electron Impact
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Graphical Abstract
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Abstract
The sensitivity of the correction factor, which describes the combined effect of finite film thickness and the thick substrate in the measurement of atomic inner-shell ionization cross-sections by low-energy electron impact, to the adopted ionization cross-sections in the Monte Carlo simulation is discussed. Moreover, the electron escape ratio from the Faraday cup in our experiment is also obtained by Monte Carlo method.
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