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ZHOU Ping, LU Xiu-qin, GUO Ji-yu, ZHAO Kui, WU Wei-ming, SUI Li, NI Mei-nan, MEI Jun-ping, LUO Hong-bing, LIU Jian-cheng. Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films[J]. Nuclear Physics Review, 2004, 21(3): 249-252. DOI: 10.11804/NuclPhysRev.21.03.249
Citation: ZHOU Ping, LU Xiu-qin, GUO Ji-yu, ZHAO Kui, WU Wei-ming, SUI Li, NI Mei-nan, MEI Jun-ping, LUO Hong-bing, LIU Jian-cheng. Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films[J]. Nuclear Physics Review, 2004, 21(3): 249-252. DOI: 10.11804/NuclPhysRev.21.03.249
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Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films

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  • Elastic recoil detection analysis of α-Si_(1-x)C_(x)∶H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality~(127)I beam bombards the target of α -Si_(1-x)C_(x)∶H_( ) thin film. A ΔE(gas)-(E(PSD)) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30° in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation.
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