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ZHENG Li-ping. Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J]. Nuclear Physics Review, 2003, 20(1): 61-65. DOI: 10.11804/NuclPhysRev.20.01.061
Citation: ZHENG Li-ping. Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J]. Nuclear Physics Review, 2003, 20(1): 61-65. DOI: 10.11804/NuclPhysRev.20.01.061

Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering

  • In 1982, phenomena of bombardmentinduced Gibssian segregation(BIGS) during alloy sputtering were found at low temperature. By using Monte Carlo(MC) simulation programs including mass effect, surface binding energy effect and bombardmentinduced Gibssian segregation effect, we especially study two important characters of BIGS (one is the character of the surface composition gradient of BIGS, and another is the intermediate character of the surface composition gradient of BIGS). The MC simulations give...
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