Isotope Puzzle in Sputtering
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Graphical Abstract
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Abstract
Mechanisms affecting multicomponent material sputtering are complex. Isotope sputtering is the simplest in the multicomponent materials sputtering. Although only mass effect plays a dominant role in the isotope sputtering, there is still an isotope puzzle in suputtering by ion bombardment. The major arguments are as follows:(1) At the zero fluence, is the isotope enrichment ejectionangleindependent or ejectionangledependent? (2)Is the isotope angular effect the primary or the ...
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