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ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. DOI: 10.11804/NuclPhysRev.14.03.164
Citation: ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. DOI: 10.11804/NuclPhysRev.14.03.164
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Development of Cathode Vacuum Arc Ion Source

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  • The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described.
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