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Zhao Wei-jiang, Wang Yu-gang, Yan Sha, Xue Jian-ming, Kang Yi-xiu, Yu Fu-chun. Development of High dose and High energy Ion Implantation[J]. Nuclear Physics Review, 1996, 13(2): 47-49. DOI: 10.11804/NuclPhysRev.13.02.047
Citation: Zhao Wei-jiang, Wang Yu-gang, Yan Sha, Xue Jian-ming, Kang Yi-xiu, Yu Fu-chun. Development of High dose and High energy Ion Implantation[J]. Nuclear Physics Review, 1996, 13(2): 47-49. DOI: 10.11804/NuclPhysRev.13.02.047
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Development of High dose and High energy Ion Implantation

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  • The development of high dose ion implantation and high energy ion implantation at the Ion Beam Application Group of IHIP in recent years is reviewed.
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