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Chen Miao, Zou Zhi-yi, Huang Jian-ming, Ye Bo-nian, Qian Wen-guo, Li Qin-wen. Ion Beam Applications on a 100keV EMIS and Ion Implanter[J]. Nuclear Physics Review, 1993, 10(4): 39-42. DOI: 10.11804/NuclPhysRev.10.04.039
Citation: Chen Miao, Zou Zhi-yi, Huang Jian-ming, Ye Bo-nian, Qian Wen-guo, Li Qin-wen. Ion Beam Applications on a 100keV EMIS and Ion Implanter[J]. Nuclear Physics Review, 1993, 10(4): 39-42. DOI: 10.11804/NuclPhysRev.10.04.039
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Ion Beam Applications on a 100keV EMIS and Ion Implanter

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  • A versatile low energy ion facility and its main specifications are described. Some newion beam applications and experimental results are given.
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