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S.T.Picraux, 邵明珠. 离子注入冶金学[J]. Nuclear Physics Review, 1985, 2(4): 28-33. DOI: 10.11804/NuclPhysRev.02.04.028
Citation:
S.T.Picraux, 邵明珠. 离子注入冶金学[J]. Nuclear Physics Review, 1985, 2(4): 28-33. DOI: 10.11804/NuclPhysRev.02.04.028
S.T.Picraux, 邵明珠. 离子注入冶金学[J]. Nuclear Physics Review, 1985, 2(4): 28-33. DOI: 10.11804/NuclPhysRev.02.04.028
Citation:
S.T.Picraux, 邵明珠. 离子注入冶金学[J]. Nuclear Physics Review, 1985, 2(4): 28-33. DOI: 10.11804/NuclPhysRev.02.04.028
离子注入冶金学
S.T.Picraux
,
邵明珠
Graphical Abstract
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Abstract
Abstract
目前,冶金学家们已经能够把周期表中任何一种元素注入到任意金属表面了。虽然注入层很薄(通常还不到1μ),却具有潜在的经济价值,而且对于金属的基础研究也有着十分重要的意义。离子注入技术就是先将离子加速,然后把它注入到固体中,通过电量多少的测量来控制注入剂量,调节离子能量的大小来控制注入深度,从而得到不同组分的新材料。
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