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355 nm纳秒激光引起熔石英微结构和光学性能变化机理

Change Mechanisms in Microstructures and Optical Properties of Fused Silica Induced by 355 nm Nanosecond Laser

  • 摘要: 借助场发射扫描电子显微镜(Field Emission Scanning Electron Microscope, FE-SEM)和红外光谱(Infrared Spectrum, IR)分析技术,研究了355 nm纳秒激光以不同能量密度辐照后,熔石英晶体的表面形貌、微结构、化学键及光学性能随激光能量密度的变化规律和机理。扫描电子显微镜(Scanning Electron Microscope, SEM)结果表明,辐照后,损伤面积随激光能量密度增加呈非线性增大;损伤区域Si元素相对含量明显提高,O元素相对含量降低,且其周围有裂纹产生。同时,较高能量密度下,清晰地观察到熔融区有丝状物生成,并对其成因进行了详细讨论。IR分析表明,低能量密度(4~8 J/cm2)辐照后,Si-O-Si键的振动模式强度总体下降且红移,表面反射率明显降低。随着能量密度增加(10~13 J/cm2),Si-O-Si键振动模式强度有一定恢复,表面反射率显著回升。位于433和557 cm−1振动模式间的SiO2剩余射线带在4 J/cm2辐照后消失,在13 J/cm2辐照后部分恢复。研究结果为熔石英晶体在惯性约束核聚变(Inertial Confinement Fusion, ICF)中充分使用提供了参考实验数据和理论依据。

     

    Abstract: In this work, the changes in surface morphologies, micro-structures, chemical bond vibrations, and optical properties of fused silica crystals after irradiated with 355 nm nanosecond laser at different energy densities were investigated by a field emission scanning electron microscope (FE-SEM) and infrared spectrum (IR) analysis techniques. The FE-SEM results indicate that the damage area after irradiation increases nonlinearly with increase of laser energy density. In the damaged region, the relative content of Si element significantly increases, while the relative content of O element decrease, and cracks appears around it. Meanwhile, it has been clearly observed that filamentous materials are generated in the melting zone, and their origins are discussed in detail. Infrared spectrum analysis shows that after irradiation with lower energy densities (4~8 J/cm2), the intensity of vibration modes from Si-O-Si bonds generally decreases and red-shift for their peak positions may occur, as well as the surface reflectivity reduces obviously. As the energy density increases (10~13 J/cm2), the intensity of Si-O-Si bond vibration modes recovers to some extent, and the surface reflectivity remarkably enhances. In addition, the reststrahlen band of SiO2 located between the 433 and 557 cm−1 vibration modes disappears after 4 J/cm2 irradiation, and partially restores after 13 J/cm2 irradiation. These research results provide reference experimental data and theoretical foundations for the full use of fused silica crystals in ICF engineerings.

     

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