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MeV 129Xe19+引起GaN薄膜微结构和光学性能变化机理研究

Change Mechanisms in Microstructures and Optical Properties of GaN Films Induced by MeV 129Xe19+ Ions

  • 摘要: 氮化镓(GaN)薄膜因其优异的光电性能和结构稳定性被广泛应用于航空航天、核工业等辐射环境中。载能离子对GaN薄膜的辐照效应有待证实。本文通过高分辨率X射线衍射(HRXRD)和紫外-可见(UV-Vis)光谱分析技术,研究不同剂量的8 MeV 129Xe19+引起(GaN)薄膜微结构、晶格应变、透射率及禁带宽度随剂量的变化规律。HRXRD结果显示,低剂量129Xe19+离子引起GaN薄膜动态退火修复,衍射峰半高宽变窄。随着辐照剂量的增加,衍射峰劈裂、逐渐向小角度偏移且半高宽展宽,表明较高剂量辐照导致GaN薄膜晶格畸变膨胀且损伤的晶面层生成。此外,通过分析GaN薄膜晶格应变与衍射层的厚度发现,衍射层厚度随剂量先略微增大而后减小,逐渐增加的应变引起了GaN晶格的扭曲和畸变。UV-Vis结果表明,透射率随离子剂量的增加先略微增大而后逐渐减小,同时,禁带宽度随剂量从3.40 eV先增大到3.42 eV而后减少至3.19 eV,且较大剂量辐照后,在450 nm (约2.75 eV)附近出现明显的吸收峰。

     

    Abstract: Gallium nitride (GaN) films are widely used in radiation environments, including aerospace, aviation and the nuclear industry etc., due to their excellent photoelectric properties and structural stabilities. However, the irradiation effects of energetic ion in GaN films are unclear and need to be clarified. In this work, microstructures, lattice strains, transmittance, and optical band-gap energy of GaN films induced by 8 MeV 129Xe19+ ion at different fluences were investigated by high-resolution X-ray diffraction (HRXRD) and ultraviolet-visible (UV-Vis) spectrum analysis techniques. The HRXRD results indicate that 129Xe19+ ion irradiation with low fluences induces a dynamic annealing effect in GaN films, leading to a shrinkage in the diffraction peak's full width at half maximum (FWHM). As the irradiation fluence increases, the diffraction peaks split and gradually shift toward lower angles, accompanied by a broadening in its FWHM. These suggested that high-fluence Xe ion irradiation causes lattice distortion, expansion, and the formation of damaged crystal layers in GaN films. Moreover, by analyzing the lattice strain and the thickness of the diffraction layer in GaN films, we observed that the thickness of the diffraction layer initially increases slightly and then decreases with the irradiation fluences. And the gradually increasing lattice strains lead to lattice expansions, twisting and distortions of the GaN films. The results from UV-Vis spectra show that the transmittance initially increases slightly and then gradually decreases with the ion fluences. Simultaneously, the optical band-gap energy first increases from 3.40 eV to 3.42 eV and then decreases to 3.19 eV as the ion fluence increases. In addition, after high-fluence irradiation, a pronounced absorption peak appears near 450 nm (~2.75 eV).

     

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